清洗设备

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Samco的等离子清洗器是一种平行板系统,用于清洗样品表面的有机和无机污染物。 处理室允许用户安装多个电极架子,架子电极配置的灵活性支持从研究到大批量生产的各种产品的批量处理。

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UV Ozone Cleaners

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Samco's UV Ozone Cleaners use a unique combination of ultraviolet irradiation, ozone, and stage heating to gently, yet effectively, remove organic materials from a variety of substrates, including silicon, glass, compound semiconductors (GaN, SiC, GaAs, and InP), sapphire, ceramics, etc. Today our product line includes, compact benchtop and cassette type systems for both R&D and mass production customers.

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