ProcessesSi, Poly-Si, SiN etching

Fabrication of nanopore devices

RIE system RIE-10NR is u…

Nanoimprint mold fabrication

This is the results of Si…

20 nm width etching of Poly-Si by RIE

This is the result of Pol…

Micro-TAS fabrication

Micro-TAS (Micro-Total An…

Failure Analysis

Defect analysis of expose…

Silica toroidal microcavity fabrication

Results of selective isot…

Movable body of Parilen

The amorphous silicon as …

Spiral structure fabrication

Wet etching has been the …