Bosch Process
The RIE-400iPB is used to make Si molds for thermal imprinting of 1 �m square and 5 �m high.
Photo courtesy of Yamagata research institute of technology
ProcessesImprinting mold fabrication
The RIE-400iPB is used to make Si molds for thermal imprinting of 1 �m square and 5 �m high.
Photo courtesy of Yamagata research institute of technology