ProcessesDeep Si etching (bosch process)

MEMS Micromirror fabrication

A device that scans space…

450 μm deep pillar formation

The RIE-800iPB was used t…

400 μm depth tapered DRIE

Forward tapered results w…

High aspect ratio etching

The high aspect ratio of …

Fabrication of a post-column mixer

Preparation of a pillar a…

Deep Si etching with an aspect ratio of 23

A high aspect ratio struc…

Penetration etching of 500 μm depth

The RIE-400iPB, a silicon…

Imprinting mold fabrication

The RIE-400iPB is used to…

Microfluidics fabrication

The RIE-400iPB is used to…